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July 1997

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From [log in to unmask] Tue Jul 22 14:
35:35 1997
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>From willli Mon Jul 21 15:
03:51 1997
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Re: Fab: Innerlayer cleanliness/Fine lines&Spaces
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Isn't the I/L cleanliness more a function of the Oxide Line then the DES
line?  With a slightly acidic (5.5-6.5 pH) DI water final rinse being best?
 Ionic contamination testing can be utilized to verify the cleanliness
results.

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