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January 1997

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Plasma
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I am interested in the Plasma desmear process. I have been reading alot
about this type of desmear technique and dont quite understand the
variables involved.
 
>From what I understand there is a combination of three gasses that
combine to create the "plasma" state ( the most common oxygen, nitrogen
and tetraflouromethane). 

How are these gasses controlled and what effects do the ratio of the
gasses effect the etchrate?

T.A. Gaylor 

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