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January 1997

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Subject:
Re: Plasma
From:
[log in to unmask]
Date:
Fri, 24 Jan 97 08:27:29 EST
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     TA Gaylor:
     
     You might want to contact Advanced Plasma Systems in St. Pete, FL or 
     look at their web page.  Very knowledgeable people.
     
     http://www.advancedplasma.com/20fa.html
     
     Regards,
     
     Ron Yanuszewski


______________________________ Reply Separator _________________________________
Subject: Plasma
Author:  [log in to unmask] at !INTERNET
Date:    1/24/97 12:45 AM


I am interested in the Plasma desmear process. I have been reading alot 
about this type of desmear technique and dont quite understand the 
variables involved.
     
>From what I understand there is a combination of three gasses that 
combine to create the "plasma" state ( the most common oxygen, nitrogen 
and tetraflouromethane). 
     
How are these gasses controlled and what effects do the ratio of the 
gasses effect the etchrate?
     
T.A. Gaylor 
     
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