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Date: | Fri, 24 Jan 97 08:27:29 EST |
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TA Gaylor:
You might want to contact Advanced Plasma Systems in St. Pete, FL or
look at their web page. Very knowledgeable people.
http://www.advancedplasma.com/20fa.html
Regards,
Ron Yanuszewski
______________________________ Reply Separator _________________________________
Subject: Plasma
Author: [log in to unmask] at !INTERNET
Date: 1/24/97 12:45 AM
I am interested in the Plasma desmear process. I have been reading alot
about this type of desmear technique and dont quite understand the
variables involved.
>From what I understand there is a combination of three gasses that
combine to create the "plasma" state ( the most common oxygen, nitrogen
and tetraflouromethane).
How are these gasses controlled and what effects do the ratio of the
gasses effect the etchrate?
T.A. Gaylor
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