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Give some details about your process. Is this happening on
Innerlayers? Outerlayers? Acid etch? Ammoniacal etch? What is
the preclean process? Exposure process? All of these can
affect resist adhesion.
I don't know of a test for resist hardness, although I'm
sure there must be someone who does. Most people use a simple
crosshatch/tape test for resist adhesion, although IMO this is
rather subjective. Provide some more info, and I'll try and
help.
Mark Dowding
Multek
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