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November 1999

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TechNet <[log in to unmask]>
Subject:
Plasma etch technical articles
From:
"Hawkins, Chuck" <[log in to unmask]>
Date:
Tue, 30 Nov 1999 12:27:53 -0700
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"TechNet E-Mail Forum." <[log in to unmask]>, "Hawkins, Chuck" <[log in to unmask]>
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I am searching for good technical articles on Plasma desmear and etching.
Specifically with a three gas system using CF4, O2, and N2.
We are etching FR4, Arlon 45N.

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