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I would try to avoid SF6 for environmental reasons. It's the world's
WORST greenhouse gas, tens of thousands of times worse than CO2, with a
"half-life" exceeding 25 human generations, at least. It is listed in
the Kyoto Protocol.
Brian
Tharaka Chandanayaka wrote:
> Hi everyone,
>
> I was wondering that anyone came across any methods that can etch Sapphire
> wafers in low temperatures. If know please let me know. Tech net is a great
> source of information.
>
> Thank you
> Tharaka Chandanayaka
> [log in to unmask]
>
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