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Wed, 28 Oct 1998 13:08:44 EST |
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We use oxide weight gain as a process control on our oxide line. Recently, it
has been suggested that I consider using oxide peel strength tests as some
sort of process indicator. It has also been suggested that SEM's of the oxide
surface would be helpful in some way.
I have always thought that SEM's were good for looking at oxide growth
structure, but not for thickness or anything else. I have the following
questions:
1. Is anyone using SEM's of oxide surface for a regular process
control/indicator? What are you looking for in a SEM?
2. What peel strength should I expect to see from a non-reduced oxide in a
polyimide application? I've always thought that anything over 1 lb/inch was
good. Is there some industry spec or standard for polyimide peels (oxide)?
Thanks,
Josh
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