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Subject:
Re[2]: GEN: Persulfate / Sulfuric Baths
From:
[log in to unmask]
Date:
Mon, 09 Dec 96 12:36:43 PST8
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     Rudy, 
        Try Reactoetch controller available form Morton . This system 
     maintains Copper level based on panel count typically at 1.8 ounces / 
     gallon.
     
     Mike Covel
     
     HMSC , Tucson
     
     [log in to unmask]


______________________________ Reply Separator _________________________________
Subject: Re: GEN: Persulfate / Sulfuric Baths
Author:  [log in to unmask] at CCGATE
Date:    12/8/96 9:41 PM


In a message dated 96-12-08 20:46:52 EST, you write:
     
>I'd like to hold a narrow etch rate window with fewer bath changes. 
>
>
     
Likely the only way to do this is with a color controlled feed and bleed 
apparatus.   Tell us where your microetch is in the process, and if it is 
spray or immersion, and there may be some other ideas.
     
Best regards,
     
Rudy Sedlak
RD Chemical Company
     
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