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May 1999

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Subject:
From:
Jim Jablonsky <[log in to unmask]>
Reply To:
Date:
Tue, 11 May 1999 14:43:07 -0400
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Dear Chuck:

Contrary to what you hear in the field, there are ceramic filters that are capable of filtering resist
skins to below .2 microns or better.  We are currently evaluating several systems in the field, and are
also testing these systems on various developing solutions.  Current yields are varying between 85% to
95%.  (These figures were generated by  beta site units being evaluated in  very large P.C. production
facilities.)

If you would like more information on these elements or where total systems can be purchased, please
contact me.

Jim Jablonsky
ph:  215.368.6822
fax:215.362.0413
e-mail:  [log in to unmask]

Chuck Brummer wrote:

> Hi Techies,
>
> I am removing my resist skins at strip resist, with a moving belt
> filter.  I want to go one better.  Anyone out there using a better
> mousetrap?  There are several rotating drum filters.  Are these any
> better?  Who loves the one they have?  I need to try to keep the
> footprint down, maybe less than 30" x 48".
>
> Thanks for the help
>
> Chuck Brummer
> [log in to unmask]
>
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