When I worked in a manufacturing facility, we used sodium chloride in our
cupric etcher to increase etch rate.  We did experience faster wear on the
equipment using this method.  Nozzles in particular seemed to wear faster,
although we also had problems with pumps. 

You can achieve an increase in etch rate by running at a higher than usual
normality, without causing machine wear.  There is a  trade-off here as well;
normality higher than about 3.0 can attack photoresist.  If you decide to run
a high normality, I'd recommend using a system of carbon filtration.

Mark Dowding
Regional Technical Specialist
Insulectro

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