I have a few questions regarding AOI capabilities. We currently have 2 reflective Automated Optical Inspection machines which are having difficulty processing lines that start at .004 and .005 mils. After etch, the top of these lines are usually less than .003. The problem is related to numerous Psuedo defects due to oxidation spots ( we use double treat foil ) and other discolorations of the copper surface. I have had quite a bit of experience with various AOI systems over the years and have yet to find a reflective system that can efficiently and accordantly handle these type of line widths, regardless of what copper is used. I have found that reflective systems on fine lines typically generate many false callouts ( sometimes in the hundreds ). My experience indicates that reflective systems are fine on lines starting at 6 mils (5 if you have an excellent etching process) but become cumbersome on the smaller line widths. I'm of the impression that to overcome this problem, a laser based system is required. I am looking into the laser systems now. However, it seems Orbotech is the only game in town for laser based AOI machines.