Looking for technical information on plasma etch. Specifically we are using a Plasma Etch Inc. chamber. 13.56 MHz RF. Etching Arlon 45N. Uniformity of etch is terrible. CF4/O2 gas [log in to unmask] <mailto:[log in to unmask]> 972 603-7202 ############################################################## TechNet Mail List provided as a free service by IPC using LISTSERV 1.8c ############################################################## To subscribe/unsubscribe, send a message to [log in to unmask] with following text in the body: To subscribe: SUBSCRIBE TECHNET <your full name> To unsubscribe: SIGNOFF TECHNET ############################################################## Please visit IPC web site (http://www.ipc.org/html/forum.htm) for additional information. If you need assistance - contact Gayatri Sardeshpande at [log in to unmask] or 847-509-9700 ext.5365 ##############################################################