Jim,
Plasma cleaning to get rid of silicones?  I'm no plasma chemist, but my
first guess would be - it depends.  An oxygen-containing plasma would
probably not be a good idea, as you might end up with a nice silica layer
all over everything.  A hydrogen based plasma might do it, decomposing the
silicones to silane (SiH4) and derivatives.  Of course this assumes the
contaminate is over everything and the plasma does not attack anything else.
:)   I have also heard of cases where plasmas have produced ESD damage in
ICs.  Anyone else care to take a crack at this one?

regards,
Bev Christian
Nortel Networks

> -----Original Message-----
> From: Jim Marsico 516-595-5879 [SMTP:[log in to unmask]]
> Sent: Thursday, August 12, 1999 1:29 PM
> To:   [log in to unmask]
> Subject:      Re: [TN] SILICONE CONTAMINATION
>
> Someone suggested plasma cleaning to remove silicone residue.  Is this a
> viable
> option?
>
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