Isn't the I/L cleanliness more a function of the Oxide Line then the DES line? With a slightly acidic (5.5-6.5 pH) DI water final rinse being best? Ionic contamination testing can be utilized to verify the cleanliness results. *************************************************************************** * TechNet mail list is provided as a service by IPC using SmartList v3.05 * *************************************************************************** * To subscribe/unsubscribe send a message <to: [log in to unmask]> * * with <subject: subscribe/unsubscribe> and no text in the body. * *************************************************************************** * If you are having a problem with the IPC TechNet forum please contact * * Dmitriy Sklyar at 847-509-9700 ext. 311 or email at [log in to unmask] * ***************************************************************************