"Handbook of Plasma Processing Technology" Edited by S. Rossnagel, J. Cuomo, and W. Westwood Noyes Publication ISBN 0-8155-1220-1 Randy Reed Merix Corporation [log in to unmask] Wrote: | | | | I am looking for reference material (articles, books, | papers, etc) | that specifically discuss plasma etchback processes. | Any suggestions ? | | Thanks, | | D.Drake | | |