"Handbook of Plasma Processing Technology"
Edited by S. Rossnagel, J. Cuomo, and W. Westwood
Noyes Publication
ISBN 0-8155-1220-1

Randy Reed
Merix Corporation

[log in to unmask] Wrote:
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|      I am looking for reference material (articles, books, 
| papers, etc) 
|      that specifically discuss plasma etchback processes. 
| Any suggestions ?
|      
|      Thanks,
|      
|      D.Drake
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|       
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