>We like to use the above gas for plasma etching and like to know if this gas >is safe to use and if any safety precausions are required. I have a feeling that you might encounter a problem with corrosion using ammonia in an aluminum vacuum vessel. Are you currently using ammonia in your process at the moment? *************************************************************************** * TechNet mail list is provided as a service by IPC using SmartList v3.05 * *************************************************************************** * To unsubscribe from this list at any time, send a message to: * * [log in to unmask] with <subject: unsubscribe> and no text. * ***************************************************************************