Joyce,
I am going to send a couple old papers on plasma cleaning to Inge to see if
he will incorporate them into his drop box. They are both 1989 vintage,
essentially back in the olden days of plasma cleaning, so may be of little
specific use, other than generics.
If I get the time I will attempt to search through some of the 1990-2000
ISHM/IMAPs symposiums for more info
?Thought you were on vacation ...?
Steve Creswick
Sr Associate - Balanced Enterprise Solutions
http://www.linkedin.com/in/stevencreswick
616 834 1883
-----Original Message-----
From: TechNet [mailto:[log in to unmask]] On Behalf Of Joyce Koo
Sent: Thursday, June 13, 2013 10:22 AM
To: [log in to unmask]
Subject: Re: [TN] Dropbox
Inge, any study regarding the potential damage of memory by UV ozone?
Especially, programmables. Thx.
--------------------------
Sent using BlackBerry
----- Original Message -----
From: Inge Hernefjord [mailto:[log in to unmask]]
Sent: Thursday, June 13, 2013 09:37 AM
To: [log in to unmask] <[log in to unmask]>
Subject: [TN] Dropbox
/ Cleaning
added
1. Relative Etch rate in Fluorcarbon Plasmas
2.UV/Ozone Cleaning of Surfaces
3. Very Low Temperature Ashing (VLTA)
Old information, still actual, but hard to find. Most about cleaning was
done more than 20 years ago. The Cyprus guru knows. He has written a good
book that is permanently on my desk.
Inge
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