Sorry, did not see that this topic is already fixed. > waste bin Inge -------------------------------------------------- From: "Inge" <[log in to unmask]> Sent: den 25 August 2010 23:24 To: <[log in to unmask]> Subject: Re: [TN] plasma question > Typical overload issue. The antenna sends a high RF pulse train or CW that > brings the molecules and atoms to dance like mad = local heat = gas > generation = ashing . The RF generator is matched with the antenna and the > antenna is matched with the chamber and its normal load of organics for > cleaning. If there is a mismatch, the RF generator will work harder and > the power stage transistors will burn. If you have a real big chamber it's > not transistors, so I think yours is an ordinary 1x1x1 meter chamber or > so. > > 1) Check for loose cables or connectors. I was cleaning a chamber and did > not replace parts correctly. PZZZZTSSSCCHH....... > 2) Check the antenna, may be a crack in the insulation or the antenna is > out of position. Result: overload and burnt transistor > 3) Check for loose particles that may shorten and cause overload. > 4) Chech that you are not running in reverse mode, if you got such a > machine. If so, you may get sputtering instead. > 5) Check water cooling system. Water that diffuses into the chamber can > cause sparking. > > The plasma chamber is an easy machine to inspect. Just go for a > screwdriver set and insex or torque kits. You will find the failure > within some minutes. NEVER switch on before everything is replaced. It's > a dangerous machine, kills a man easily. If you are not an experienced > electronic trouble shooter, don't touch anything! NEVER let the > departments Mr Fixer do anything either. RF Hi Voltage things are not the > same as bread toasters or desk lamps. > > You must have hundreds of suitable cooperators around, Rockwell Collins > could build plasma cleaners themselves. You must be one of the best > equipped companies on this planet. > > Inge > > -------------------------------------------------- > From: "Douglas Pauls" <[log in to unmask]> > Sent: den 16 August 2010 15:07 > To: <[log in to unmask]> > Subject: [TN] plasma question > >> Good morning all, >> For those of you who have used plasma etching on circuit assemblies, I >> have a question. One of our operators observed "sparking" through the >> plasma chamber viewport and a transistor was fried. Any idea what causes >> this? First time we have seen this. >> >> Doug Pauls >> >> ______________________________________________________________________ >> This email has been scanned by the MessageLabs Email Security System. >> For more information please contact helpdesk at x2960 or [log in to unmask] >> ______________________________________________________________________ >> >> --------------------------------------------------- >> Technet Mail List provided as a service by IPC using LISTSERV 15.0 >> To unsubscribe, send a message to [log in to unmask] with following text in >> the BODY (NOT the subject field): SIGNOFF Technet >> To temporarily halt or (re-start) delivery of Technet send e-mail to >> [log in to unmask]: SET Technet NOMAIL or (MAIL) >> To receive ONE mailing per day of all the posts: send e-mail to >> [log in to unmask]: SET Technet Digest >> Search the archives of previous posts at: >> http://listserv.ipc.org/archives >> Please visit IPC web site >> http://www.ipc.org/contentpage.asp?Pageid=4.3.16 for additional >> information, or contact Keach Sasamori at [log in to unmask] or 847-615-7100 >> ext.2815 >> ----------------------------------------------------- > > > ______________________________________________________________________ > This email has been scanned by the MessageLabs Email Security System. > For more information please contact helpdesk at x2960 or [log in to unmask] > ______________________________________________________________________ > > --------------------------------------------------- > Technet Mail List provided as a service by IPC using LISTSERV 15.0 > To unsubscribe, send a message to [log in to unmask] with following text in > the BODY (NOT the subject field): SIGNOFF Technet > To temporarily halt or (re-start) delivery of Technet send e-mail to > [log in to unmask]: SET Technet NOMAIL or (MAIL) > To receive ONE mailing per day of all the posts: send e-mail to > [log in to unmask]: SET Technet Digest > Search the archives of previous posts at: http://listserv.ipc.org/archives > Please visit IPC web site http://www.ipc.org/contentpage.asp?Pageid=4.3.16 > for additional information, or contact Keach Sasamori at [log in to unmask] or > 847-615-7100 ext.2815 > ----------------------------------------------------- ______________________________________________________________________ This email has been scanned by the MessageLabs Email Security System. For more information please contact helpdesk at x2960 or [log in to unmask] ______________________________________________________________________ --------------------------------------------------- Technet Mail List provided as a service by IPC using LISTSERV 15.0 To unsubscribe, send a message to [log in to unmask] with following text in the BODY (NOT the subject field): SIGNOFF Technet To temporarily halt or (re-start) delivery of Technet send e-mail to [log in to unmask]: SET Technet NOMAIL or (MAIL) To receive ONE mailing per day of all the posts: send e-mail to [log in to unmask]: SET Technet Digest Search the archives of previous posts at: http://listserv.ipc.org/archives Please visit IPC web site http://www.ipc.org/contentpage.asp?Pageid=4.3.16 for additional information, or contact Keach Sasamori at [log in to unmask] or 847-615-7100 ext.2815 -----------------------------------------------------