Daan,
 
In one of my former lives (Burroughs Corp./Unisys) I ran into a similar debacle.
I found a lab in San Mateo, Ca. USA that had a "laser microprobe" which had better Z-axis resolution than standard SEM techniques (Auger, etc.) The residue we were after had similar properties and we were able to get a solid identity of the compound with this instrument despite it's thin deposit.
 
 
Regards,
 
Ed Popielarski
QTA Machine
10 Mc Laren, Ste. D
Irvine, Ca. 92618
 
Ph: 949-581-6601
Fx: 949-581-2448
Cellular: 949-337-2578
 
http://www.qta.net
 
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