Here's the academic explanation:
Electron Cyclotron Resonance works by putting in an oscillating electric
field at the same frequency of a free (not bounded to an atom) electron in
free space while in an intense magnetic field. The useful resonance
frequency (something like eB/mc, with B=magnetic field, and I'll let you
ponder the rest, and the formula can be off a bit) is in the microwave
region. Hence, ECR sources are basically microwave ovens (cost concious
folks sometimes use a Sears Kenmore with the side cut out to put the vacuum
chamber source inside. It is closer to commercial in quality than one would
think). The electrons pick up the electric field energy in the same way a
surfer picks up energy from paddling onto an ocean wave. As the electrons
resonate in their "cyclotron radius", they collide with other atoms and
ionize those.
Practically, the beauty of this technique is that you create an intensely
dense plasma (ions are of our interest here, although the electrons also
comprise a plasma) in comparison to plasmas created by parallel plate
capacitance chambers, etc. This plasma is used as the ions that sputter off
target material that subsequently deposits onto your panel/substrate (while
reacting with whatever gas is in the area). Contrary to Joyce's response,
ECR is used for high quality plasma processing (sputtering, ion implantation
sources, etc.). One example are those gold color drill bits you buy (both
in the PWB world and at the hardware store. Those are TiN implanted bits
using ECR as the plasma source to sputter Ti in a N2 atmosphere. The
disadvantage of ECR is having a separate magnetic field source (the power
supplies for current are dresser size). The operating cost is not that much
more. I don't see much other disadvantage compare to other plasma sources.
Scientifically, ECR has been used to probe solids for electron density,
mobility, etc....not of interest in this forum.
Again, ECR is used in vacuum deposition, otherwise you get electrical arcing
just
like you have in your home microwave if you left a fork in there.
Astek in Massachussets (I think) has been a pioneer in manufacturing these
sources if you want to call them up and gawk.
Carey
-----Original Message-----
From: Paul Klasek <[log in to unmask]>
To: [log in to unmask] <[log in to unmask]>
Date: Friday, December 03, 1999 7:31 PM
Subject: Re: [TN] anti-abrasion finish
>yo' got me here, how does ECR work Joyce ? and $ ?
>Sounds better than baked 3pack duco on abrased bonnet
>
>paul
>
>-----Original Message-----
>From: joyce [mailto:[log in to unmask]]
>Sent: Saturday, 4 December 1999 13:09
>To: [log in to unmask]
>Subject: Re: [TN] anti-abrasion finish
>
>
>May be you should look into large area SiO2 deposition using ECR (electron
>cycletron resonance) process. It is NOT high vacuum process and can be
used
>for large area coating (don't ask me how to rework or take it
off....)..Good
>luck.
> jk
>At 08:09 AM 12/4/99 +1100, you wrote:
>>Carey I have no idea where Ralph is coming from (wet or dry process),
>>only thing understood was protection of metal .
>>You're quite correct, TiN coats are vacuum and vapor deposit,
>>nothing wet about it .
>>
>>Where did this wet note came from , Ralph did not mention any (neither
me).
>>You got me bit confused : know the application ?
>>Why did you highlight the refractory character ?
>>And, yes , big sheet coat is a process (and chamber) problem
>>
>>Paul
>>
>>-----Original Message-----
>>From: Carey Pico [mailto:[log in to unmask]]
>>Sent: Friday, 3 December 1999 10:33
>>To: [log in to unmask]
>>Subject: Re: [TN] anti-abrasion finish
>>
>>
>>Can you get a decent TiN coating with wet plating? I thought that was a
>>vacuum process.
>>
>>Carey
>>-----Original Message-----
>>From: Paul Klasek <[log in to unmask]>
>>To: [log in to unmask] <[log in to unmask]>
>>Date: Thursday, December 02, 1999 2:46 PM
>>Subject: Re: [TN] anti-abrasion finish
>>
>>
>>>Why don't you try Ti Nitride coatings Ralph,
>>>there are 3-4 different colours/formulations (apart from the oldest
>goldish
>>>one);
>>>they're relatively cheap, work superbly ;
>>>it's basically a ceramic coat, with mildly different hardness ratios .
>>>Metal finish is always inferior to ceramic coats ;
>>>and those nowadays go even to engines = quite common .
>>>Microcrystalline alumina is way out of any metal's reach ;
>>>as you're moving just below diamond ceiling in carborundum strata .
>>>
>>>You can also get the part sintered fully from ceramic compound,
>>>if possible/necessary/affordable = pending application
>>>
>>>Let me know if you get stuck or need more details,
>>>with application
>>>
>>>Paul Klasek (aka the carbon fan [as all of us])
>>>ResMed
>>>
>>>PS
>>>The cer coats being hard are fragile = you still need a very good (hard)
>>>base,
>>>and treat the part as an egg .
>>>Than the polish (lengthy, automated, as glass polish) = smooth surface,
>>will
>>>lengthen the life of the surface.
>>>Still, keep in mind you're in 9.th (10.th diamond) scale with alumina,
>>>don't expect infinite service .
>>>
>>>PPS
>>>The synthetic diamond has been formed in few labs,
>>>but we'd be in straight vertical stratosphere on $'s .
>>>
>>>NB
>>>Just hook on search engines with "ceramic coats" and "ceramic tool bit
(or
>>>tip)" ;
>>>should give you plenty options .
>>>Cer. tip could be the one for you
>>>
>>>
>>>-----Original Message-----
>>>From: Vaughan, Ralph H [mailto:[log in to unmask]]
>>>Sent: Friday, 3 December 1999 5:50
>>>To: [log in to unmask]
>>>Subject: [TN] anti-abrasion finish
>>>
>>>
>>>Hi TN,
>>>
>>>A follow-up query to a recent posting about sand-type abrasion for you
>>>metalheads (Dave H., you there?); Is there a metal finish that will
>>>withstand rubbing wear from aluminum oxide powder? we have tried
tungstun
>>>carbide and stellite with 'no joy'. Any light bulbs going on?
>>>
>>>Thanks for thinking
>>>
>>>Ralph Vaughan
>>>
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