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Date: | Mon, 13 Sep 1999 23:51:08 +0100 |
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Hi Yasmeen,
Luckily I still hang onto my semiconductor processing books from Grad.
school (SC Babe!).
Sheet Resistance of a diffusion layer can be measured with a four point
probe.
Sheet Resistance, R
Average Resistivity, p (rho)
Layer Thickness, x
p = Rx (Ohm-cm)
From page 419, Semiconductor Integrated Circuit Processing Technology by
Runyan and Bean, 1994
Does that help or do PCB folks calculate it a different way?
Hans
~~~~~~~~
Hans Michel Hinners WR-ALC/LYPME Bldg.
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Materials Engineer 380 Second Street,
Suite 104
Manufacturing Eng. Sec. Robins AFB GA 31098-1638
912-926-1970 (Voice) 468 - 1970 (DSN) 912-926-7974 (Fax)
[log in to unmask]
> -----Original Message-----
> From: nishath yasmeen [SMTP:[log in to unmask]]
> Sent: Monday, September 13, 1999 06:05
> To: [log in to unmask]
> Subject: [TN] Sheet resistance Vs resistivity
>
> Hello Technetters,
> What is the difference between S.resistance and Resistivity and how
> can I convert one from the other?
> Thank you in advance.
> Yasmeen
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