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May 1999

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Subject:
Re: Ammoniacal Etchant Recipe
From:
"Meigs, Jonathan" <[log in to unmask]>
Reply To:
TechNet E-Mail Forum." <[log in to unmask]>, "Meigs, Jonathan" <[log in to unmask]>
Date:
Thu, 27 May 1999 05:37:23 -0700
Content-Type:
text/plain
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text/plain (96 lines) 
Good Morning Yu-Shan,

Thank you for taking the time to reply. I am not allowed to go into great
detail, but generally, I am selectively etching copper versus another metal.
I am using immersion due to practical constraints. I was using a commercial
etchant intended for spray etch, and it was at best slow, smelly and
frustrating. The smell (though I actually like the smell of ammonia) is
easily dealt with in a fume hood, though it is a shared hood with
production, and quite "crowded". For these reasons, I believe a two-part
chemistry may be preferred for our initial work.

Again, thank you for your help, it will come in quite valuable as we scale
up our experiments to a more 'realistic' process.

Sincerely,

Jonathan Meigs
AlliedSignal Oak-Mitsui
(518)686-8019

-----Original Message-----
From: Yu-Shan Han [mailto:[log in to unmask]]
Sent: Wednesday, May 26, 1999 6:40 PM
To: [log in to unmask]
Subject: Re: [TN] Ammoniacal Etchant Recipe


Hello again,

I'm not sure about the purpose of your experiment.  If the purpose is to
test the adhesion of photo resist, immersion won't tell you much.  If you
want to study the etch rate, this works.  You might be able to get the
relationship curve of etch rate versus Cu++ concentration in the etchant
over time.  Just remember the curve shapes like a bell.  The etch rate
is very slow in fresh etchant.  As the Cu++ builds up, the etch rate picks
up.  After certain point etch rate goes down due to high Cu++.  That's
where you want to replenish.  Let me know if you need more information.

Yu-Shan Han
Lead One Technology, Inc.
(206)368-8429

-----Original Message-----
From: TechNet [mailto:[log in to unmask]]On Behalf Of Meigs, Jonathan
Sent: Wednesday, May 26, 1999 11:53 AM
To: [log in to unmask]
Subject: Re: [TN] Ammoniacal Etchant Recipe


Thanks for the replies, and the reminder to be specific.
I would much prefer to immerse the samples for etching (they are about 3" by
5").

If necessary, I could build a small spray etcher, I suppose, but maintaining
temperature of a small volume of etchant recirculating after spray might be
a challenge.

Any recommendations are most welcome, and again thank you for the advice.

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