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May 1999

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Subject:
From:
nishath yasmeen <[log in to unmask]>
Reply To:
TechNet E-Mail Forum.
Date:
Tue, 18 May 1999 15:16:53 -0500
Content-Type:
text/plain
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text/plain (22 lines)
Hello, I want to measure grain size of plated copper on wafers. I have a
few questions about this.
Our SEM lab tech says that copper has to be annealed for this. Is it
necessary? If it is why is it done? What is the recommended time and
temperature?
Does the thickness of the deposit make a difference?
I appreciate any suggestions.
Thanks
Yasmeen

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