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November 1998

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Subject:
From:
Ted Stern <[log in to unmask]>
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Date:
Fri, 6 Nov 1998 11:05:29 -0800
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Dear Josh:

I would recommend contacting OXFORD V.U.E, INC. at 626-256-6557.  They
have lots of good data regarding etching speed, undercut, and control
methods.

Regards,
Ted Stern


[log in to unmask] wrote:
>
> I'm new at cupric etching.  What are the parameters for the average innerlayer
> etch line?  What controls should I be monitoring, for example, normality,
> copper content, etc? What ranges will provide me the best process in terms of
> etch line quality (minimum copper foot with best possible line width
> uniformity and etch speed)?  I know equipment has a lot to do with the
> results; we can't change equipment, so I'm looking to improve quality with
> chemistry.
>
> Thanks.
>
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