We use oxide weight gain as a process control on our oxide line.  Recently, it
has been suggested that I consider using oxide peel strength tests as some
sort of process indicator.  It has also been suggested that SEM's of the oxide
surface would be helpful in some way.

I have always thought that SEM's were good for looking at oxide growth
structure, but not for thickness or anything else.  I have the following
questions:

1.  Is anyone using SEM's of oxide surface for a regular process
control/indicator?  What are you looking for in a SEM?

2.  What peel strength should I expect to see from a non-reduced oxide in a
polyimide application?  I've always thought that anything over 1 lb/inch was
good.  Is there some industry spec or standard for polyimide peels (oxide)?

Thanks,

Josh

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