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Hi Josh,
We also use weight gain as a process control tool. We use a reduced Oxide
system and check weight loss after microetch, weight gain after oxide and after
reduction. The weight gain is controlled so as not to produce too thick a layer
of oxide. I agree with you as to the use of SEM's; they may show crystal
structure, but that is about the extent of their usefulness. We also do
routine peel strengths. I'm suprised that you get 1 PLI on polyimide with a
non-reduced oxide. That is about the mean peel strength we get with our reduced
oxide bath.
Regards,
Les
> From: [log in to unmask], on 10/28/98 1:08 PM:
> We use oxide weight gain as a process control on our oxide line. Recently,
> it
> has been suggested that I consider using oxide peel strength tests as some
> sort of process indicator. It has also been suggested that SEM's of the
> oxide
> surface would be helpful in some way.
>
> I have always thought that SEM's were good for looking at oxide growth
> structure, but not for thickness or anything else. I have the following
> questions:
>
> 1. Is anyone using SEM's of oxide surface for a regular process
> control/indicator? What are you looking for in a SEM?
>
> 2. What peel strength should I expect to see from a non-reduced oxide in a
> polyimide application? I've always thought that anything over 1 lb/inch was
> good. Is there some industry spec or standard for polyimide peels (oxide)?
>
> Thanks,
>
> Josh
>
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