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Josh,
Is the oxide copper oxides?
Richard
-----Original Message-----
From: [log in to unmask] <[log in to unmask]>
To: [log in to unmask] <[log in to unmask]>
Date: Wednesday, October 28, 1998 2:40 PM
Subject: [TN] Oxide process controls
>We use oxide weight gain as a process control on our oxide line. Recently,
it
>has been suggested that I consider using oxide peel strength tests as some
>sort of process indicator. It has also been suggested that SEM's of the
oxide
>surface would be helpful in some way.
>
>I have always thought that SEM's were good for looking at oxide growth
>structure, but not for thickness or anything else. I have the following
>questions:
>
>1. Is anyone using SEM's of oxide surface for a regular process
>control/indicator? What are you looking for in a SEM?
>
>2. What peel strength should I expect to see from a non-reduced oxide in a
>polyimide application? I've always thought that anything over 1 lb/inch
was
>good. Is there some industry spec or standard for polyimide peels (oxide)?
>
>Thanks,
>
>Josh
>
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