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October 1998

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Wed, 28 Oct 1998 16:14:35 -0500
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"TechNet E-Mail Forum." <[log in to unmask]>, Richard Haynes <[log in to unmask]>
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Richard Haynes <[log in to unmask]>
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Josh,
Is the oxide copper oxides?
Richard

-----Original Message-----
From: [log in to unmask] <[log in to unmask]>
To: [log in to unmask] <[log in to unmask]>
Date: Wednesday, October 28, 1998 2:40 PM
Subject: [TN] Oxide process controls


>We use oxide weight gain as a process control on our oxide line.  Recently,
it
>has been suggested that I consider using oxide peel strength tests as some
>sort of process indicator.  It has also been suggested that SEM's of the
oxide
>surface would be helpful in some way.
>
>I have always thought that SEM's were good for looking at oxide growth
>structure, but not for thickness or anything else.  I have the following
>questions:
>
>1.  Is anyone using SEM's of oxide surface for a regular process
>control/indicator?  What are you looking for in a SEM?
>
>2.  What peel strength should I expect to see from a non-reduced oxide in a
>polyimide application?  I've always thought that anything over 1 lb/inch
was
>good.  Is there some industry spec or standard for polyimide peels (oxide)?
>
>Thanks,
>
>Josh
>
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