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September 1998

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Date:
Mon, 28 Sep 1998 09:24:19 -0700
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From:
Ted Stern <[log in to unmask]>
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Dear Mr. Fudalewski:

In a DES or SES line, the equipment configuration may pose difficulties
in obtaining a uniform process speed for the entire system; especially
if processing 1/2, 1, and 2 oz copper.  Often, it is the etch which
determines process speed, hence it is necessary to configure the other
chemistries to perform within the operating window established by the
etch.  Certainly there will be situations where equipment limitations
simply will not allow same speed processing of DES or SES systems, thus
the slowest process dictates the maximum operating speed; such as
operating only on of two etch chambers when processing 1/2 oz. copper.

But I do think it is possible to maintain a uniform processing speed for
developing, resist stripping, and solder stripping procedures within DES
or SES systems.  Granted, you may have to change resist and solder
stripping baths more frequently than etching or developing baths; but
even high volume throughput systems can still often obtain 10-14 days at
consistent processing speeds. I have observed smaller systems operate
more than 48 days at constant speeds without changing any chemistry.

You are correct in ascertaining there are more variables to consider
than chemistry alone.  And aside from equipment limitations, other
important variables include resist particulate filtration and waste
treatment methods and capacity.  But with careful advance planning, I
think many suppliers and fabricators have worked well together in
achieving high quality, consistent processing speeds, and easy to
operate DES and SES lines.

Regards,
Ted Stern

[log in to unmask] wrote:
>
> read all the mail in regards to thiss topic - everything sounds fine n dandy -
> but everything mentioned will not give a constant striiping speed - or if the
> speed is constant - it cannot be - let's say - at a speed in proportion to the
> etcher n tin stripper - and how long wud it last. just spent over 18 months
> working on whole process tie in - controls and effects. the actual kind of dry
> film has an effect on it also. this industry has failed in the last few years
> to actually understand the complexity of it all - lot more to it than having
> proper control or straight chemistry itself
>
> Rick Fudalewski
> Atotech Canada
>
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