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May 1998

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Subject:
From:
Marco Biagtan <[log in to unmask]>
Reply To:
TechNet E-Mail Forum.
Date:
Thu, 21 May 1998 12:51:18 +0800
Content-Type:
text/plain
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text/plain (71 lines)
thanks for the response.

I use a coordinate measuring machine and measure four corner points on the
photo tool. At first, I get the dimensions of the master film (X1,X2,Y1,Y2)
and then compare this with the dimensions taken from the contact film.  The
contact film always show about -30 to -40 micron reduction in length.

Marco

----------
> From: drilbert <[log in to unmask]>
> To: [log in to unmask]
> Subject: Re: [TN] Photo tool stability
> Date: Wednesday, May 20, 1998 11:34 PM
>
> What is your measurement method?
> Marco Biagtan wrote:
> >
> > Hi Guys,
> >
> > I have a problem with dimensional stability of photo tools.  The photo
> > tools shrink after processing.  I've tried increasing the drying
> > temperature (50-55C) just so it will not shrink but it still does.
This is
> > really giving me a headache.  Any suggestions?
> >
> > Marco Biagtan
> > NEC-CPI Process Engineer.
> >
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