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April 1998

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From:
Robisan1 <[log in to unmask]>
Reply To:
TechNet E-Mail Forum.
Date:
Fri, 24 Apr 1998 08:14:03 EDT
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Clarissa
It depends upon when you can check for smear.
If you are lucky enough to do it after desmear and
prior to other metallization steps, you can send the
sample through your oxide line.  The copper inner
layers at the the barrel will turn black because they
will be coated with oxide - the copper areas with a
fine coat of smear will remain copper colored because
the oxide won't stick to the copper under the smear

If you have to inspect after all processes - then
microsection as received will tell you if you have smear
There are a few of us who believe if you can see a line
where the inner layer connection should be prior to microetch
it is a very large probability that you have smear instead of
separation. (Of course it is separation no matter whether smear
or separation)

Susan Mansilla
Robisan Lab

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