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February 1998

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Subject:
From:
"Ducas,Patrick" <[log in to unmask]>
Reply To:
TechNet E-Mail Forum.
Date:
Thu, 19 Feb 1998 13:04:00 -0500
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TEXT/PLAIN (43 lines)
Hi everybody!

I'm looking for people that are familiar with plasma cleaning systems,
particulary vacuum ionization cleaner (VIC500 by Electronetics Corporation).
Many years ago, we bought an unit and we do now have a problem with the
tool. This system is used to clean hybrid circuitry prior to bonding.

We were not sure that the machine was completly functionnal because there
was any way to be sure or monitor that the RF plasma was operating properly.
We did a hole in the body frame in order to see the plasma reaction in the
chamber (a color appears when the RF plasma is in function).

Since we did that, we have seen that the orange color may be there and few
seconds or minutes later may be off for a while and come back for a while
and so. In my mind, a plasma system may be active until the displayed time
has elapsed but we are experiencing a irregularity plasma activation during
the process. I have never seen that before on systems I have worked with.

Is there someone that can tell me if this kind of machine is set so to give
a on/off plasma during the process or tell me that we have maybe a
electrical or vacuum problem. Also, is there someone who knows if the
company still in live and where I can find them. A service representative
would be fine too.

Thanks in advance

Patrick Ducas
Mfg Engineer
CMC / Hybrid Microelectronics
Tel: (514) 748-3000 ext 4409

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