I found what Robert Welch said about acid cleaners interesting. We have
found that our ferric chloride based cleaner has, for years, increased HAL
yields becouse of its ability to remove excess mask. We suspected that that
it was becouse of the chlorides.
It seems like the resist stripper bath is a little exteme, but it sounds like
it is only used for special problems.
Scott Griggs
RBP Chemical Corp.
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