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Date: | Tue, 15 Apr 1997 13:32:11 +0000 |
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Sam,
I would suggest that you have some type of resist lockin that becomes
worse where the tape is applying more pressure to the resist during
printing, hence the "frame" appearance. I would also check the
surface topography of whatever you are laminating over. Is it more
mat or porous than normal. Also check that a lamination roller
has"nt gone whacky. The fact that you do not have Cu/Cu adhesion
problems would probably rule out dev/preclean/microetch problems but
check all these as well especially the rinses after dev,
preclean and microetch. Surface residue problems will typically
first show up on large ground areas, maybe due to the lower current
densities during the first few seconds of the plating cycle. If the
copper/surface film doesn't"t plate the first few seconds you can hang
it up.
Electrical contact problems could also only show up at the higher
currents. Check your cell voltage it should not be much over 1.5
volts . If it is, load some dummys and start looking for a hot spot.
If you don't find the problem near the front end try pulling samples
of all your solutions starting with the developer rinse and run hull
cell coupons sheared out of your normal material after developing off
an unexposed panel. Watch the coupons carefully at each step
especially during plate initialization. If you see anything funny
substitute a new solution at that point and see if it goes away.
Everyone loves a mystery . Good luck and let us know what you find.
Robert E. Welch
Process Specialist
Email: [log in to unmask]
Modem: 804-239-9120
Fax: 804-237-3048
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