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February 1997

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Subject:
From:
Ed Cosper <[log in to unmask]>
Date:
Wed, 19 Feb 1997 14:11:42 -0600
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Dear John,

Although this would be a "slurry" scrubber, I have found the aluminum oxide scrubber to product an excellent surface prep. The aluminum oxide is actually a polisher and does not remove any of the deposition. In addition, when combined with a SP microetch, it provides an excellent surface for mask adhesion. I have found this process to virtually eliminate the age old problem of mask peel at the top of gold contacts.  

Thanks,

Ed Cosper
Director Quality Assurance and Engineering
[log in to unmask]

----------
From:  John Perna[SMTP:[log in to unmask]]
Sent:  Tuesday, February 18, 1997 8:01 PM
To:  [log in to unmask]
Subject:  Surface Preparation

I am interested in methods of post Shadow surface preparation. I am
looking towards some type of double sided scrubber. I would like to
avoid
pumice and other abrasive slurry scrubbers if possible. What works the
best?

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