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| From [log in to unmask] Wed Feb 19 14: |
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Dear John,
Although this would be a "slurry" scrubber, I have found the aluminum oxide scrubber to product an excellent surface prep. The aluminum oxide is actually a polisher and does not remove any of the deposition. In addition, when combined with a SP microetch, it provides an excellent surface for mask adhesion. I have found this process to virtually eliminate the age old problem of mask peel at the top of gold contacts.
Thanks,
Ed Cosper
Director Quality Assurance and Engineering
[log in to unmask]
----------
From: John Perna[SMTP:[log in to unmask]]
Sent: Tuesday, February 18, 1997 8:01 PM
To: [log in to unmask]
Subject: Surface Preparation
I am interested in methods of post Shadow surface preparation. I am
looking towards some type of double sided scrubber. I would like to
avoid
pumice and other abrasive slurry scrubbers if possible. What works the
best?
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