TECHNET Archives

January 1997

TechNet@IPC.ORG
Options: Use Monospaced Font
Show Text Part by Default
Show All Mail Headers

Message: [<< First] [< Prev] [Next >] [Last >>]
Topic: [<< First] [< Prev] [Next >] [Last >>]
Author: [<< First] [< Prev] [Next >] [Last >>]

Print Reply
Subject:
Plasma
From:
[log in to unmask] (Timothy Gaylor)
Date:
Thu, 23 Jan 1997 23:25:53 -0500
Content-Type:
TEXT/PLAIN
Parts/Attachments:
TEXT/PLAIN (25 lines) 
I am interested in the Plasma desmear process. I have been reading alot
about this type of desmear technique and dont quite understand the
variables involved.
 
>From what I understand there is a combination of three gasses that
combine to create the "plasma" state ( the most common oxygen, nitrogen
and tetraflouromethane). 

How are these gasses controlled and what effects do the ratio of the
gasses effect the etchrate?

T.A. Gaylor 

***************************************************************************
* TechNet mail list is provided as a service by IPC using SmartList v3.05 *
***************************************************************************
* To unsubscribe from this list at any time, send a message to:           *
* [log in to unmask] with <subject: unsubscribe> and no text.        *
***************************************************************************
* If you are having a problem with the IPC TechNet forum please contact   *
* Dmitriy Sklyar at 847-509-9700 ext. 311 or email at [log in to unmask]      *
***************************************************************************

ATOM RSS1 RSS2