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Date: | Fri, 24 Jan 1997 18:49:49 -0600 |
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Gaylor,
Not sure where you are hearing that Plasma is good, but past fab shop
I've worked for or surveyed from the customer end, have moved away
from using plasma. I could be wrong and someone in the forum may
correct me, but this has been the underlying trend.
Several reasons are:
1. Cost, the dry-chemicals are very expensive.
2. You typically have non-uniform smear removal of the hole wall.
3. Check your local city and state ordinance on chemicals.
4. Expensive equipment.
5. Proper air ventilation in-place
If you have low volumes, use sulfuric acid, but have safe and
preventive measures in place.
For higher volumes, I would highly recommend using Permanganate for
smear removal. The advantages outweigh the disadvantages of using
this make-up. Once you have your two chemistries mixed, just add DI
or replace evaporated water.
Regards,
John Gulley - QA
Inet Inc.
Plano, TX 75075-7270
______________________________ Reply Separator _________________________________
Subject: Plasma
Author: [log in to unmask] (Timothy Gaylor) at Internet
Date: 1/23/97 11:25 PM
I am interested in the Plasma desmear process. I have been reading alot
about this type of desmear technique and dont quite understand the
variables involved.
>From what I understand there is a combination of three gasses that
combine to create the "plasma" state ( the most common oxygen, nitrogen
and tetraflouromethane).
How are these gasses controlled and what effects do the ratio of the
gasses effect the etchrate?
T.A. Gaylor
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