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Date: | Sun, 8 Dec 1996 19:36:21 -0500 |
Content-Type: | TEXT/PLAIN |
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Dear Colleagues:
Are there any studies correlating etch rates to time / temperature /
[Copper] / [Sulfuric Acid] / [Persulfate].
I'd like to hold a narrow etch rate window with fewer bath changes.
Any suggestions?
Thank you.
P.G. Wilson
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