Subject: | |
From: | |
Date: | Sun, 06 Oct 96 16:22:37 PST |
Content-Type: | text/plain |
Parts/Attachments: |
|
|
Several manufactures of radiometers make models that measure the
wavelengths. EIT and I.L. are two of them.
______________________________ Reply Separator _________________________________
Subject: Fab- monitoring wavelength in exposure units
Author: [log in to unmask] at corp
Date: 10/5/96 3:19 PM
With UV exposure units the intensity of the lamps is measured
with a radiometer. In our imaging departments, we keep a close eye on
our exposures as far as intensity. However we've been overlooking an
equally important factor, UV wavelength, and the radiometer doesn't
measure that. I am looking for a practical method of measuring and
monitoring the wavelength of the lamp as it degrades. If anyone can
steer me in the right direction or has any input on this matter, I
would appreciate talking with you.
Scott Kivi
Primary imaging / Mask applications
E-mail - [log in to unmask]
***************************************************************************
* TechNet mail list is provided as a service by IPC using SmartList v3.05 *
***************************************************************************
* To unsubscribe from this list at any time, send a message to: *
* [log in to unmask] with <subject: unsubscribe> and no text. *
***************************************************************************
***************************************************************************
* TechNet mail list is provided as a service by IPC using SmartList v3.05 *
***************************************************************************
* To unsubscribe from this list at any time, send a message to: *
* [log in to unmask] with <subject: unsubscribe> and no text. *
***************************************************************************
|
|
|