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1996

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Subject:
Fab: Using Amonia (NH3) Gas for Plasma Etching
From:
"Quality Dept. - Eltek Ltd." <[log in to unmask]>
Date:
Tue, 17 Sep 1996 16:39:34 +0300
Content-Type:
text/plain
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text/plain (15 lines) 
We like to use the above gas for plasma etching and like to know if this gas
is safe to use and if any safety precausions are required.

Naftali
Engineering

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