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01:54 1996 |
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Several manufactures of radiometers make models that measure the
wavelengths. EIT and I.L. are two of them.
______________________________ Reply Separator _________________________________
Subject: Fab- monitoring wavelength in exposure units
Author: [log in to unmask] at corp
Date: 10/5/96 3:19 PM
With UV exposure units the intensity of the lamps is measured
with a radiometer. In our imaging departments, we keep a close eye on
our exposures as far as intensity. However we've been overlooking an
equally important factor, UV wavelength, and the radiometer doesn't
measure that. I am looking for a practical method of measuring and
monitoring the wavelength of the lamp as it degrades. If anyone can
steer me in the right direction or has any input on this matter, I
would appreciate talking with you.
Scott Kivi
Primary imaging / Mask applications
E-mail - [log in to unmask]
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