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| From [log in to unmask] Tue Sep 17 11: |
03:50 1996 |
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>We like to use the above gas for plasma etching and like to know if this gas
>is safe to use and if any safety precausions are required.
I have a feeling that you might encounter a problem with corrosion using
ammonia in an aluminum vacuum vessel. Are you currently using ammonia in
your process at the moment?
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