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| From [log in to unmask] Wed Jun 26 15: |
53:46 1996 |
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"Handbook of Plasma Processing Technology"
Edited by S. Rossnagel, J. Cuomo, and W. Westwood
Noyes Publication
ISBN 0-8155-1220-1
Randy Reed
Merix Corporation
[log in to unmask] Wrote:
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| I am looking for reference material (articles, books,
| papers, etc)
| that specifically discuss plasma etchback processes.
| Any suggestions ?
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| Thanks,
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| D.Drake
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