Phil,

To echo what Joyce and Doug have said, the most sensitive components will be
those having internal cavities and interconnects within the cavities [wire
bonds {CPU's, some uP's, MEMS}, proof mass {MEMS}, some crystal oscillators,
etc.].

Wildly high ultrasonic energy levels can damage by excessive cavitation, but
it you are using equipment that is relatively new in manufacture and not
something dusted off and retrieved from the 1970's storage building out
back, you are on the right track.  

The new sweep frequency cleaners are essentially safe, but I always believe
in testing in-house as a 'trust, but verify' to make sure.

You can't test everything, but you should test something.

Steve C



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