Louis,

For microelectronics, the plasma cleaners can be in-line, or batch.

Some are not much more than a glorified microwave oven -
http://www.plasmapreen.com/

The type of equipment I am used to -
http://www.nordson.com/en-us/divisions/march/pages/default.aspx
March Plasma systems has been around for many years.  If you click on the
semiconductor link you will see various white papers that may be of some
assistance.  I would definitely dig around on their site a bit and see if
that helped with any of your questions.  


Steve Creswick
Sr Associate - Balanced Enterprise Solutions
http://www.linkedin.com/in/stevencreswick
                       




-----Original Message-----
From: TechNet [mailto:[log in to unmask]] On Behalf Of Louis Hart
Sent: Saturday, December 15, 2012 4:18 PM
To: [log in to unmask]
Subject: [TN] plasma cleaning and etching

Technetters, like other participants, I have long observed the vast array of
knowledge and experience available on this forum. My guess is that there are
some people who can advise me about books, papers, reports, etc, to consult
on plasma cleaning and etching. I want to get a good understanding of the
chemistry of physics of how plasmas are used in electronics manufacturing.
Thanks for any guidance.

Louis Hart
Compunetics
Monroeville, PA
USA
[log in to unmask]<mailto:[log in to unmask]>
412-858-1232


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