Type "march plasma" in search, go to website and find out all kinds of reference for starter.  
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----- Original Message -----
From: Louis Hart [mailto:[log in to unmask]]
Sent: Saturday, December 15, 2012 04:18 PM
To: [log in to unmask] <[log in to unmask]>
Subject: [TN] plasma cleaning and etching

Technetters, like other participants, I have long observed the vast array of knowledge and experience available on this forum. My guess is that there are some people who can advise me about books, papers, reports, etc, to consult on plasma cleaning and etching. I want to get a good understanding of the chemistry of physics of how plasmas are used in electronics manufacturing. Thanks for any guidance.

Louis Hart
Compunetics
Monroeville, PA
USA
[log in to unmask]<mailto:[log in to unmask]>
412-858-1232


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