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Date: | Wed, 25 Aug 2010 23:41:58 +0200 |
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Sorry, did not see that this topic is already fixed. > waste bin
Inge
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From: "Inge" <[log in to unmask]>
Sent: den 25 August 2010 23:24
To: <[log in to unmask]>
Subject: Re: [TN] plasma question
> Typical overload issue. The antenna sends a high RF pulse train or CW that
> brings the molecules and atoms to dance like mad = local heat = gas
> generation = ashing . The RF generator is matched with the antenna and the
> antenna is matched with the chamber and its normal load of organics for
> cleaning. If there is a mismatch, the RF generator will work harder and
> the power stage transistors will burn. If you have a real big chamber it's
> not transistors, so I think yours is an ordinary 1x1x1 meter chamber or
> so.
>
> 1) Check for loose cables or connectors. I was cleaning a chamber and did
> not replace parts correctly. PZZZZTSSSCCHH.......
> 2) Check the antenna, may be a crack in the insulation or the antenna is
> out of position. Result: overload and burnt transistor
> 3) Check for loose particles that may shorten and cause overload.
> 4) Chech that you are not running in reverse mode, if you got such a
> machine. If so, you may get sputtering instead.
> 5) Check water cooling system. Water that diffuses into the chamber can
> cause sparking.
>
> The plasma chamber is an easy machine to inspect. Just go for a
> screwdriver set and insex or torque kits. You will find the failure
> within some minutes. NEVER switch on before everything is replaced. It's
> a dangerous machine, kills a man easily. If you are not an experienced
> electronic trouble shooter, don't touch anything! NEVER let the
> departments Mr Fixer do anything either. RF Hi Voltage things are not the
> same as bread toasters or desk lamps.
>
> You must have hundreds of suitable cooperators around, Rockwell Collins
> could build plasma cleaners themselves. You must be one of the best
> equipped companies on this planet.
>
> Inge
>
> --------------------------------------------------
> From: "Douglas Pauls" <[log in to unmask]>
> Sent: den 16 August 2010 15:07
> To: <[log in to unmask]>
> Subject: [TN] plasma question
>
>> Good morning all,
>> For those of you who have used plasma etching on circuit assemblies, I
>> have a question. One of our operators observed "sparking" through the
>> plasma chamber viewport and a transistor was fried. Any idea what causes
>> this? First time we have seen this.
>>
>> Doug Pauls
>>
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