Typical overload issue. The antenna sends a high RF pulse train or CW that 
brings the molecules and atoms to dance like mad = local heat = gas 
generation = ashing . The RF generator is matched with the antenna and the 
antenna is matched with the chamber and its normal load of organics for 
cleaning. If there is a mismatch, the RF generator will work harder  and the 
power stage transistors will burn. If you have a real big chamber it's not 
transistors, so I think yours is an ordinary 1x1x1 meter chamber or so.

1) Check for loose cables or connectors.  I was cleaning a chamber and did 
not replace parts correctly.  PZZZZTSSSCCHH.......
2) Check the antenna, may be a crack in the insulation or the antenna is out 
of position. Result: overload and burnt transistor
3) Check for loose particles that may shorten and cause overload.
4) Chech that you are not running in reverse mode, if you got such a 
machine.  If so, you may get sputtering instead.
5) Check water cooling system. Water that diffuses into the chamber can 
cause sparking.

The plasma chamber is an easy machine to inspect. Just go for a screwdriver 
set and insex or torque kits.  You will find the failure within some 
minutes.  NEVER switch on before everything is replaced.  It's a dangerous 
machine, kills a man easily. If you are not an experienced electronic 
trouble shooter, don't touch anything! NEVER let the departments Mr Fixer do 
anything either.  RF Hi Voltage things are not the same as bread toasters or 
desk lamps.

You must have hundreds of suitable cooperators around,  Rockwell Collins 
could build plasma cleaners themselves.  You must be one of the best 
equipped companies on this planet.

Inge

--------------------------------------------------
From: "Douglas Pauls" <[log in to unmask]>
Sent: den 16 August 2010 15:07
To: <[log in to unmask]>
Subject: [TN] plasma question

> Good morning all,
> For those of you who have used plasma etching on circuit assemblies, I
> have a question.  One of our operators observed "sparking" through the
> plasma chamber viewport and a transistor was fried.  Any idea what causes
> this?  First time we have seen this.
>
> Doug Pauls
>
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