Subject: | |
From: | |
Reply To: | |
Date: | Wed, 25 Aug 2010 23:24:17 +0200 |
Content-Type: | text/plain |
Parts/Attachments: |
|
|
Typical overload issue. The antenna sends a high RF pulse train or CW that
brings the molecules and atoms to dance like mad = local heat = gas
generation = ashing . The RF generator is matched with the antenna and the
antenna is matched with the chamber and its normal load of organics for
cleaning. If there is a mismatch, the RF generator will work harder and the
power stage transistors will burn. If you have a real big chamber it's not
transistors, so I think yours is an ordinary 1x1x1 meter chamber or so.
1) Check for loose cables or connectors. I was cleaning a chamber and did
not replace parts correctly. PZZZZTSSSCCHH.......
2) Check the antenna, may be a crack in the insulation or the antenna is out
of position. Result: overload and burnt transistor
3) Check for loose particles that may shorten and cause overload.
4) Chech that you are not running in reverse mode, if you got such a
machine. If so, you may get sputtering instead.
5) Check water cooling system. Water that diffuses into the chamber can
cause sparking.
The plasma chamber is an easy machine to inspect. Just go for a screwdriver
set and insex or torque kits. You will find the failure within some
minutes. NEVER switch on before everything is replaced. It's a dangerous
machine, kills a man easily. If you are not an experienced electronic
trouble shooter, don't touch anything! NEVER let the departments Mr Fixer do
anything either. RF Hi Voltage things are not the same as bread toasters or
desk lamps.
You must have hundreds of suitable cooperators around, Rockwell Collins
could build plasma cleaners themselves. You must be one of the best
equipped companies on this planet.
Inge
--------------------------------------------------
From: "Douglas Pauls" <[log in to unmask]>
Sent: den 16 August 2010 15:07
To: <[log in to unmask]>
Subject: [TN] plasma question
> Good morning all,
> For those of you who have used plasma etching on circuit assemblies, I
> have a question. One of our operators observed "sparking" through the
> plasma chamber viewport and a transistor was fried. Any idea what causes
> this? First time we have seen this.
>
> Doug Pauls
>
> ______________________________________________________________________
> This email has been scanned by the MessageLabs Email Security System.
> For more information please contact helpdesk at x2960 or [log in to unmask]
> ______________________________________________________________________
>
> ---------------------------------------------------
> Technet Mail List provided as a service by IPC using LISTSERV 15.0
> To unsubscribe, send a message to [log in to unmask] with following text in
> the BODY (NOT the subject field): SIGNOFF Technet
> To temporarily halt or (re-start) delivery of Technet send e-mail to
> [log in to unmask]: SET Technet NOMAIL or (MAIL)
> To receive ONE mailing per day of all the posts: send e-mail to
> [log in to unmask]: SET Technet Digest
> Search the archives of previous posts at: http://listserv.ipc.org/archives
> Please visit IPC web site http://www.ipc.org/contentpage.asp?Pageid=4.3.16
> for additional information, or contact Keach Sasamori at [log in to unmask] or
> 847-615-7100 ext.2815
> -----------------------------------------------------
______________________________________________________________________
This email has been scanned by the MessageLabs Email Security System.
For more information please contact helpdesk at x2960 or [log in to unmask]
______________________________________________________________________
---------------------------------------------------
Technet Mail List provided as a service by IPC using LISTSERV 15.0
To unsubscribe, send a message to [log in to unmask] with following text in
the BODY (NOT the subject field): SIGNOFF Technet
To temporarily halt or (re-start) delivery of Technet send e-mail to [log in to unmask]: SET Technet NOMAIL or (MAIL)
To receive ONE mailing per day of all the posts: send e-mail to [log in to unmask]: SET Technet Digest
Search the archives of previous posts at: http://listserv.ipc.org/archives
Please visit IPC web site http://www.ipc.org/contentpage.asp?Pageid=4.3.16 for additional information, or contact Keach Sasamori at [log in to unmask] or 847-615-7100 ext.2815
-----------------------------------------------------
|
|
|